Plasma Processing of Semiconductors
by P.f. Williams
2020-07-22 11:40:09
Plasma Processing of Semiconductors
by P.f. Williams
2020-07-22 11:40:09
Plasma Processing of Semiconductorscontains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and...
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Plasma Processing of Semiconductorscontains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience:Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
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